검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of low dielectric constant amorphous carbon nitride films Aono M, Nitta S, Katsuno T, Itoh T, Nonomura S Applied Surface Science, 159, 341, 2000 |
| No. | Article |
|---|---|
| 1 |
Characterization of low dielectric constant amorphous carbon nitride films Aono M, Nitta S, Katsuno T, Itoh T, Nonomura S Applied Surface Science, 159, 341, 2000 |