검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
4H-SiC carbon-face epitaxial layers grown by low-pressure hot-wall chemical vapor deposition Kojima K, Takahashi T, Ishida Y, Kuroda S, Okumura H, Arai K Materials Science Forum, 457-460, 209, 2004 |
| No. | Article |
|---|---|
| 1 |
4H-SiC carbon-face epitaxial layers grown by low-pressure hot-wall chemical vapor deposition Kojima K, Takahashi T, Ishida Y, Kuroda S, Okumura H, Arai K Materials Science Forum, 457-460, 209, 2004 |