검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Experimental determination of image placement accuracy in extreme ultraviolet lithography Raghunathan S, Wood O, Vukkadala P, Engelstad R, Hartley JG Journal of Vacuum Science & Technology B, 27(6), 2905, 2009 |
| 2 |
Exploration of etch step interactions in the dual patterning process for process modeling Melvin LS, Ward BS, Song H, Rhie SU, Lucas KD, Wiaux V, Verhaegen S, Maenhoudt M Journal of Vacuum Science & Technology B, 26(6), 2434, 2008 |