검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of optical computerized tomography in capacitively coupled plasmas and inductively coupled plasmas for plasma etching Makabe T, Petrovic ZL Applied Surface Science, 192(1-4), 88, 2002 |
| No. | Article |
|---|---|
| 1 |
Development of optical computerized tomography in capacitively coupled plasmas and inductively coupled plasmas for plasma etching Makabe T, Petrovic ZL Applied Surface Science, 192(1-4), 88, 2002 |