검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of epitaxial silicon carbide films using high vacuum MOCVD method for MEMS applications Lim DC, Jee HG, Kim JW, Moon JS, Lee SB, Choi SS, Boo JH Thin Solid Films, 459(1-2), 7, 2004 |
| No. | Article |
|---|---|
| 1 |
Deposition of epitaxial silicon carbide films using high vacuum MOCVD method for MEMS applications Lim DC, Jee HG, Kim JW, Moon JS, Lee SB, Choi SS, Boo JH Thin Solid Films, 459(1-2), 7, 2004 |