검색결과 : 2건
No. | Article |
---|---|
1 |
Si-SiO2 interface formation in low-dose low-energy separation by implanted oxygen materials Jutarosaga T, Manne S, Seraphin S Applied Surface Science, 250(1-4), 168, 2005 |
2 |
Infrared spectroscopy of Si-O bonding in low-dose low-energy separation by implanted oxygen materials Jutarosaga T, Jeoung JS, Seraphin S Thin Solid Films, 476(2), 303, 2005 |