검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Self-consistent charge-up simulation for the microscopic feature of SiO2 layer in rf capacitive discharge Lee SH, Lee JK, Jung SW, Kim DW, You SJ Current Applied Physics, 15(11), 1463, 2015 |
| 2 |
Distributed electron cyclotron resonance plasma: A technology for large area deposition of device-quality a-Si : H at very high rate Leempoel P, Descamps P, de Meerendre TK, Charliac J, Cabarrocas PRI, Bulkin P, Daineka D, Dao TH, Kleider JP, Gueunier-Farret ME, Longeaud C Thin Solid Films, 516(20), 6853, 2008 |
| 3 |
Positive bias effects on the growth of diamond at pressures below 100 mTorr Teii K, Yoshida T Thin Solid Films, 316(1-2), 24, 1998 |