검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Control of large area VHF plasma produced at high pressure Nishimiya T, Yamane T, Takeuchi Y, Yamauchi Y, Takatsuka H, Muta H, Uchino K, Kawai Y Thin Solid Films, 519(20), 6931, 2011 |
| 2 |
Development of high frequency micro plasma source in a magnetic field Matsushita M, Matsuda Y, Fujiyama H Thin Solid Films, 435(1-2), 285, 2003 |