검색결과 : 1건
No. | Article |
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1 |
An integrated model for halide chemical vapor deposition of silicon carbide epitaxial films Wang R, Ma RH Journal of Crystal Growth, 310(18), 4248, 2008 |
No. | Article |
---|---|
1 |
An integrated model for halide chemical vapor deposition of silicon carbide epitaxial films Wang R, Ma RH Journal of Crystal Growth, 310(18), 4248, 2008 |