검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Growth of diamond thin films on SiCN underlayers by hot filament chemical vapor deposition Katamune Y, Mori H, Izumi A Thin Solid Films, 635, 53, 2017 |
| 2 |
The influence of chemical groups on the mechanical properties of SiCNH coatings deposited on 7075 aluminum alloy Kaczmarek L, Kyziol K, Sawicki J, Steglinski M, Radziszewska H, Szymanski W, Kolodziejczyk L, Atraszkiewicz R, Kottfer D, Zawadzki P Thin Solid Films, 534, 15, 2013 |
| 3 |
The structure, surface topography and mechanical properties of Si-C-N films fabricated by RF and DC magnetron sputtering Shi ZF, Wang YJ, Du C, Huang N, Wang L, Ning CY Applied Surface Science, 258(4), 1328, 2011 |
| 4 |
Effect of pressure and substrate temperature on the deposition of nano-structured silicon-carbon-nitride superhard coatings by magnetron sputtering Mishra SK, Shekhar C, Rupa PKP, Pathak LC Thin Solid Films, 515(11), 4738, 2007 |
| 5 |
플라즈마 화학증착법에 의한 질화탄소규소 박막의 성장과 Si 나노점 형성 홍주형, 김상훈, 한윤봉 Korean Chemical Engineering Research, 42(4), 447, 2004 |
| 6 |
Effect of the deposition conditions on the morphology and bonding structure of SiCN films Cheng WJ, Jiang JC, Zhang Y, Zhu HS, Shen DZ Materials Chemistry and Physics, 85(2-3), 370, 2004 |
| 7 |
Structures and properties of the SiNC films on Si wafer at different deposition stages Wu JY, Kuo CT, Liu TL Thin Solid Films, 398-399, 413, 2001 |
| 8 |
Crystalline SiCN: a hard material rivals to cubic BN Chen LC, Chen KH, Wei SL, Kichambare PD, Wu JJ, Lu TR, Kuo CT Thin Solid Films, 355-356, 112, 1999 |