검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma immersion nitrogen implantation into silicon and rapid thermal electron beam annealing for surface structuring Markwitz A, Kennedy VJ, Short K, Rudolphi M, Baumann H Current Applied Physics, 4(2-4), 241, 2004 |
| No. | Article |
|---|---|
| 1 |
Plasma immersion nitrogen implantation into silicon and rapid thermal electron beam annealing for surface structuring Markwitz A, Kennedy VJ, Short K, Rudolphi M, Baumann H Current Applied Physics, 4(2-4), 241, 2004 |