검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
SIMS and high-resolution RBS analysis of ultrathin SiOxNy films Kimura K, Nakajima K, Kobayashi H, Miwa S, Satori K Applied Surface Science, 203, 418, 2003 |
| No. | Article |
|---|---|
| 1 |
SIMS and high-resolution RBS analysis of ultrathin SiOxNy films Kimura K, Nakajima K, Kobayashi H, Miwa S, Satori K Applied Surface Science, 203, 418, 2003 |