화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Loop Type of Inductively Coupled Thermal Plasmas System for Rapid Two-Dimensional Oxidation of Si Substrate Surface
Tsuchiya T, Tanaka Y, Maruyama Y, Fujita A, Tial MKS, Uesugi Y, Ishijima T, Yukimoto T, Kawaura H
Plasma Chemistry and Plasma Processing, 38(3), 599, 2018
2 Multipulse irradiation of silicon by femtosecond laser pulses: Variation of surface morphology
Lugomer S, Maksimovic A, Farkas B, Geretovszky Z, Szorenyi T, Toth AL, Zolnai Z, Barsony I
Applied Surface Science, 258(8), 3589, 2012
3 Stable aluminium ohmic contact to surface modified porous silicon
Kanungo J, Maji S, Saha H, Basu S
Solid-State Electronics, 53(6), 663, 2009
4 Surface grafting of polyimide onto silicon surface: Preparation and characterization
Liu YL, Chen SC, Liu CS
Journal of Polymer Science Part A: Polymer Chemistry, 45(17), 4161, 2007
5 Maskless and electroless fabrication of patterned metal nanostructures on silicon wafers by controlling local surface activities
Homma T, Kubo N, Osaka T
Electrochimica Acta, 48(20-22), 3115, 2003