화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Thermal stability of tungsten-titanium diffusion barriers for silver metallization
Bhagat SK, Theodore ND, Alford TL
Thin Solid Films, 516(21), 7451, 2008
2 Tungsten-titanium diffusion barriers for silver metallization
Bhagat S, Han H, Alford TL
Thin Solid Films, 515(4), 1998, 2006
3 Evaluation of diffusion barrier and electrical properties of tantalum oxynitride thin films for silver metallization
Misra E, Wang Y, Theodore ND, Alford TL
Thin Solid Films, 457(2), 338, 2004
4 A study of the factors influencing the kinetics in Ag/Al bilayer systems
Malgas GF, Adams D, Alford TL, Mayer JW
Thin Solid Films, 467(1-2), 267, 2004
5 Processing and encapsulation of silver patterns by using reactive ion etch and ammonia anneal
Zeng YX, Chen LH, Zou YL, Nguyen PA, Hansen JD, Alford TL
Materials Chemistry and Physics, 66(1), 77, 2000
6 Texture, twinning and secondary extinction of vacuum deposited silver thin films
Tomov I, Adamik M, Barna PB
Thin Solid Films, 371(1-2), 17, 2000