검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Silicon carbonitride by remote microwave plasma CVD from organosilicon precursor: Physical and mechanical properties of deposited Si : C : N films Blaszczyk-Lezak I, Wrobel AM Applied Surface Science, 253(18), 7404, 2007 |
| No. | Article |
|---|---|
| 1 |
Silicon carbonitride by remote microwave plasma CVD from organosilicon precursor: Physical and mechanical properties of deposited Si : C : N films Blaszczyk-Lezak I, Wrobel AM Applied Surface Science, 253(18), 7404, 2007 |