검색결과 : 1건
No. | Article |
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1 |
Spatial transition of the electron gas from the active to the remote plasma state Loffhagen D, Sigeneger F, Winkler R Plasma Chemistry and Plasma Processing, 23(3), 415, 2003 |
No. | Article |
---|---|
1 |
Spatial transition of the electron gas from the active to the remote plasma state Loffhagen D, Sigeneger F, Winkler R Plasma Chemistry and Plasma Processing, 23(3), 415, 2003 |