검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Properties of SiO2 and Si3N4 layers deposited by MF twin magnetron sputtering using different target materials Ruske M, Brauer G, Pistner J, Szczyrbowski J, Weigert M Thin Solid Films, 351(1-2), 158, 1999 |
| No. | Article |
|---|---|
| 1 |
Properties of SiO2 and Si3N4 layers deposited by MF twin magnetron sputtering using different target materials Ruske M, Brauer G, Pistner J, Szczyrbowski J, Weigert M Thin Solid Films, 351(1-2), 158, 1999 |