검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Linear internal inductively coupled plasma (ICP) source with magnetic fields for large area processing Lee YJ, Kim KN, Song BK, Yeom GY Thin Solid Films, 435(1-2), 275, 2003 |
| No. | Article |
|---|---|
| 1 |
Linear internal inductively coupled plasma (ICP) source with magnetic fields for large area processing Lee YJ, Kim KN, Song BK, Yeom GY Thin Solid Films, 435(1-2), 275, 2003 |