검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of stress behaviors and mechanism of void formation in sputtered TiSix films Suh YS, Park DG, Jang SA Thin Solid Films, 450(2), 341, 2004 |
| No. | Article |
|---|---|
| 1 |
Investigation of stress behaviors and mechanism of void formation in sputtered TiSix films Suh YS, Park DG, Jang SA Thin Solid Films, 450(2), 341, 2004 |