검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
DECOMPOSITION OF THE MOST POTENT GREENHOUSE GAS (GHG) SULPHUR HEXAFLUORIDE (SF6) USING A DIELECTRIC BARRIER DISCHARGE (DBD) PLASMA Zhuang Q, Clements B, McFarlan A, Fasoyinu Y Canadian Journal of Chemical Engineering, 92(1), 32, 2014 |
| 2 |
Optimisation of a home-made RIE system - Effect of SF6 plasma on the properties of partially etched a-Si : H films Pereira P, Lavareda G, do Rego AMB, Amaral A, de Carvalho CN Materials Science Forum, 455-456, 124, 2004 |