화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time
Xu Q, Yang ZQ, Fu B, Li JH, Wu H, Zhang QH, Sun YN, Ding GF, Zhao XL
Applied Surface Science, 387, 569, 2016
2 Microbumpers maintain superhydrophobicity of nano structured surfaces upon touch
Jung ID, Lee MC, Lim H, Smela E, Ko JS
Applied Surface Science, 349, 705, 2015
3 Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems
Olivares J, Clement M, Gonzalez-Castilla S, Vergara L, Iborra E, Sangrador J
Thin Solid Films, 518(18), 5128, 2010
4 Characterization of a piezoresistive microcantilever as a sensor for detecting the bio-molecules
Yoo KA, Na KH, Joung SR, Jeon D, Choi YJ, Kim YS, Kang CJ
Materials Science Forum, 510-511, 1090, 2006
5 A novel electrostatic microactuator for large deflections in MEMS applications
Singh J, Agarwal A, Soundarapandian M
Thin Solid Films, 504(1-2), 64, 2006
6 Development of a high-throughput LPCVD process for depositing low stress poly-SiC
Fu XA, Dunning J, Zorman CA, Mehregany M
Materials Science Forum, 457-460, 305, 2004
7 Advanced processing techniques for silicon carbide MEMS and NEMS
Zorman CA, Mehregany M
Materials Science Forum, 457-460, 1451, 2004
8 Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers
Phinney LM, Rogers JW
Journal of Adhesion Science and Technology, 17(4), 603, 2003
9 Development of a multilayer SiC surface micromachining process with capabilities and design rules comparable to conventional polysilicon surface micromachining
Song X, Rajgopal S, Melzak JM, Zorman CA, Mehregany M
Materials Science Forum, 389-3, 755, 2002
10 Manufacturing of surface micromachined structures for chemical sensors
Moldovan C, Kim BH, Raible S, Moagar V
Thin Solid Films, 383(1-2), 321, 2001