1 |
A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time Xu Q, Yang ZQ, Fu B, Li JH, Wu H, Zhang QH, Sun YN, Ding GF, Zhao XL Applied Surface Science, 387, 569, 2016 |
2 |
Microbumpers maintain superhydrophobicity of nano structured surfaces upon touch Jung ID, Lee MC, Lim H, Smela E, Ko JS Applied Surface Science, 349, 705, 2015 |
3 |
Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems Olivares J, Clement M, Gonzalez-Castilla S, Vergara L, Iborra E, Sangrador J Thin Solid Films, 518(18), 5128, 2010 |
4 |
Characterization of a piezoresistive microcantilever as a sensor for detecting the bio-molecules Yoo KA, Na KH, Joung SR, Jeon D, Choi YJ, Kim YS, Kang CJ Materials Science Forum, 510-511, 1090, 2006 |
5 |
A novel electrostatic microactuator for large deflections in MEMS applications Singh J, Agarwal A, Soundarapandian M Thin Solid Films, 504(1-2), 64, 2006 |
6 |
Development of a high-throughput LPCVD process for depositing low stress poly-SiC Fu XA, Dunning J, Zorman CA, Mehregany M Materials Science Forum, 457-460, 305, 2004 |
7 |
Advanced processing techniques for silicon carbide MEMS and NEMS Zorman CA, Mehregany M Materials Science Forum, 457-460, 1451, 2004 |
8 |
Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers Phinney LM, Rogers JW Journal of Adhesion Science and Technology, 17(4), 603, 2003 |
9 |
Development of a multilayer SiC surface micromachining process with capabilities and design rules comparable to conventional polysilicon surface micromachining Song X, Rajgopal S, Melzak JM, Zorman CA, Mehregany M Materials Science Forum, 389-3, 755, 2002 |
10 |
Manufacturing of surface micromachined structures for chemical sensors Moldovan C, Kim BH, Raible S, Moagar V Thin Solid Films, 383(1-2), 321, 2001 |