화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Depth profiling of ultra-thin oxynitride gate dielectrics by using MCs2+ technique
Gui D, Mo ZQ, Xing ZX, Huang YH, Hua YN, Zhao SP, Cha LZ
Applied Surface Science, 255(4), 1437, 2008
2 Accurate depth profiling for ultra-shallow implants using backside-SIMS
Hongo C, Tomita M, Takenaka M
Applied Surface Science, 231-2, 673, 2004
3 The dose dependence of Si sputtering with low energy ions in shallow depth profiling
Moon DW, Lee HI
Applied Surface Science, 203, 27, 2003
4 Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS
Hongo C, Tomita A, Takenaka M, Murakoshi A
Applied Surface Science, 203, 264, 2003
5 Comments on on an exact analytical solution of the Boussinesq equation, Transport in Porous Media 39, 339-345, 2000
Kacimov AR, Serrano SE
Transport in Porous Media, 52(3), 389, 2003