화학공학소재연구정보센터
검색결과 : 9건
No. Article
1 Effects of low-temperature surface-wave plasma treatment with various gases on surface modification of chitosan
Ogino A, Kral M, Yamashita M, Nagatsu M
Applied Surface Science, 255(5), 2347, 2008
2 Deposition of polycrystalline SiGe by surface wave excited plasma
Takanishi Y, Okayasu I, Toyoda H, Sugai H
Thin Solid Films, 516(11), 3554, 2008
3 Gas barrier properties of hydrogenated amorphous carbon films coated on polymers by surface-wave plasma chemical vapor deposition
Ogino A, Nagatsu M
Thin Solid Films, 515(7-8), 3597, 2007
4 Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O-2
Nakao S, Stamate E, Sugai H
Thin Solid Films, 515(12), 4869, 2007
5 High-speed mu c-Si films deposition and large-grain poly-Si films deposition by surface wave discharge
Hotta Y, Toyoda H, Sugai H
Thin Solid Films, 515(12), 4983, 2007
6 Estimation of hot electron beam in planar surface wave plasmas from measured magnetic field
Siry M, Yoshikawa A, Terebessy T, Kando M
Thin Solid Films, 506, 508, 2006
7 Development of high-efficiency laser Thomson scattering measurement system for the investigation of EEDF in surface wave plasma
Aramaki M, Kobayashi J, Kono A, Stamate E, Sugai H
Thin Solid Films, 506, 679, 2006
8 Characteristics of time modulated surface wave argon plasma
Ohgushi T, Okamoto T, Watanabe S, Okamoto Y
Applied Surface Science, 169, 593, 2001
9 Converting methane by using an RF plasma reactor
Hsieh LT, Lee WJ, Chen CY, Chang MB, Chang HC
Plasma Chemistry and Plasma Processing, 18(2), 215, 1998