화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Ga assisted in situ etching of AlGaInAs and InGaAsP multi quantum well structures using tertiarybutylchloride
Codato S, Campi R, Rigo C, Stano A
Journal of Crystal Growth, 282(1-2), 7, 2005
2 Surface quality of InP etched with tertiarybutylchloride in an MOVPE reactor
Franke D, Sabelfeld N, Ebert W, Harde P, Wolfram P, Grote N
Journal of Crystal Growth, 248, 421, 2003
3 Fabrication of AlGaInAs and GaInAsP buried heterostructure lasers by in situ etching
Gessner R, Dobbinson A, Miler A, Rieger J, Veuhoff E
Journal of Crystal Growth, 248, 426, 2003
4 In situ etching using a novel precursor of tertiarybutylchloride (TBCl)
Kondow M, Shi BQ, Tu CW
Journal of Crystal Growth, 209(2-3), 263, 2000
5 MOVPE-based in situ etching of In(GaAs)P/InP using tertiarybutylchloride
Wolfram P, Ebert W, Kreissl J, Grote N
Journal of Crystal Growth, 221, 177, 2000