검색결과 : 5건
No. | Article |
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1 |
Ga assisted in situ etching of AlGaInAs and InGaAsP multi quantum well structures using tertiarybutylchloride Codato S, Campi R, Rigo C, Stano A Journal of Crystal Growth, 282(1-2), 7, 2005 |
2 |
Surface quality of InP etched with tertiarybutylchloride in an MOVPE reactor Franke D, Sabelfeld N, Ebert W, Harde P, Wolfram P, Grote N Journal of Crystal Growth, 248, 421, 2003 |
3 |
Fabrication of AlGaInAs and GaInAsP buried heterostructure lasers by in situ etching Gessner R, Dobbinson A, Miler A, Rieger J, Veuhoff E Journal of Crystal Growth, 248, 426, 2003 |
4 |
In situ etching using a novel precursor of tertiarybutylchloride (TBCl) Kondow M, Shi BQ, Tu CW Journal of Crystal Growth, 209(2-3), 263, 2000 |
5 |
MOVPE-based in situ etching of In(GaAs)P/InP using tertiarybutylchloride Wolfram P, Ebert W, Kreissl J, Grote N Journal of Crystal Growth, 221, 177, 2000 |