검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evaluation of the thermal stability of reactively sputtered (Ti, Zr)N-x nano-thin films as diffusion barriers between Cu and silicon Kuo YL, Lee C, Lin JC, Yen YW, Lee WH Thin Solid Films, 484(1-2), 265, 2005 |
| No. | Article |
|---|---|
| 1 |
Evaluation of the thermal stability of reactively sputtered (Ti, Zr)N-x nano-thin films as diffusion barriers between Cu and silicon Kuo YL, Lee C, Lin JC, Yen YW, Lee WH Thin Solid Films, 484(1-2), 265, 2005 |