검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Hot-wall CVD growth of 4H-SiC using Si2Cl6+C3H8+H-2 system Miyanagi T, Nishino S Materials Science Forum, 389-3, 199, 2002 |
| No. | Article |
|---|---|
| 1 |
Hot-wall CVD growth of 4H-SiC using Si2Cl6+C3H8+H-2 system Miyanagi T, Nishino S Materials Science Forum, 389-3, 199, 2002 |