검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of halogen in high-density oxygen plasmas on photoresist trimming Sin CY, Chen BH, Loh WL, Yu J, Yelehanka P, See A, Chan L AIChE Journal, 50(7), 1578, 2004 |
| No. | Article |
|---|---|
| 1 |
Effect of halogen in high-density oxygen plasmas on photoresist trimming Sin CY, Chen BH, Loh WL, Yu J, Yelehanka P, See A, Chan L AIChE Journal, 50(7), 1578, 2004 |