검색결과 : 1건
No. | Article |
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1 |
Numerical and experimental study of polysilicon deposition on silicon tubes Cai D, Zheng LL, Wan Y, Hariharan AV, Chandra M Journal of Crystal Growth, 250(1-2), 41, 2003 |
No. | Article |
---|---|
1 |
Numerical and experimental study of polysilicon deposition on silicon tubes Cai D, Zheng LL, Wan Y, Hariharan AV, Chandra M Journal of Crystal Growth, 250(1-2), 41, 2003 |