화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Experimental and numerical studies of tungsten line growth in laser chemical vapor deposition
Ning B, Xia T, Tong ZX, He YL
International Journal of Heat and Mass Transfer, 140, 564, 2019
2 Static dissolution rate of tungsten film versus chemical adjustments of a reused slurry for chemical mechanical polishing
Coetsier CM, Testa F, Carretier E, Ennahali M, Laborie B, Mouton-arnaud C, Fluchere O, Moulin P
Applied Surface Science, 257(14), 6163, 2011
3 Stress relaxation induced faceted Cu and W particles on the surfaces of Cu-Zr and W thin films
Sun HL, Song ZX, Ma F, Xu KW
Applied Surface Science, 255(22), 8972, 2009
4 Analysis of tungsten film electrodeposited from a ZnCl2-NaCl-KC1 melt
Nitta K, Inazawa S, Okada K, Nakajima H, Nohira T, Hagiwara R
Electrochimica Acta, 53(1), 20, 2007