검색결과 : 1건
No. | Article |
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1 |
Electrical properties of ultra-thin oxynitrided layer using N2O plasma in inductively coupled plasma chemical vapor deposition for non-volatile memory on glass Jung S, Hwang S, Kim K, Dhungel SK, Chung HK, Choi BD, Lee KY, Yi J Thin Solid Films, 515(16), 6615, 2007 |