화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Impacts of channel film thickness on poly-Si tunnel thin-film transistors
Ma WCY, Hsu HS, Fang CC, Jao CY, Liao TH
Thin Solid Films, 660, 926, 2018
2 Self-aligned fabrication of 10 nm wide asymmetric trenches for Si/SiGe heterojunction tunneling field effect transistors using nanoimprint lithography, shadow evaporation, and etching
Wang C, Chou SY
Journal of Vacuum Science & Technology B, 27(6), 2790, 2009