검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Neutralization of ion beams for reduction of charging damage in plasma etching Stojkovic A, Radmilovic-Radenovic M, Petrovic ZL Materials Science Forum, 494, 297, 2005 |
| No. | Article |
|---|---|
| 1 |
Neutralization of ion beams for reduction of charging damage in plasma etching Stojkovic A, Radmilovic-Radenovic M, Petrovic ZL Materials Science Forum, 494, 297, 2005 |