검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Comparative investigation of TaN and SiCN barrier layer for Cu/ultra low k integration Yang LY, Zhang DH, Li CY, Liu R, Lu PW, Foo PD, Wee ATS Thin Solid Films, 504(1-2), 265, 2006 |
| 2 |
Comparative study of Ta, TaN and Ta/TaN bi-layer barriers for Cu-ultra low-k porous polymer integration Yang LY, Zhang DH, Li CY, Foo PD Thin Solid Films, 462-63, 176, 2004 |