화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Non-metallic effects in silicided gate MOSFETs
Rodriguez N, Gamiz F, Clerc R, Sampedro C, Godoy A, Ghibaudo G
Solid-State Electronics, 53(12), 1313, 2009
2 Study of pinholes in ultrathin SiO2 by C-AFM technique
Marathe VG, Stefanov Y, Schwalke U, DasGupta N
Thin Solid Films, 504(1-2), 11, 2006
3 Effect of oxidation temperature on the quality and reliability of ultrathin gate oxide
Marathe VG, Chandani N, DasGupta N
Thin Solid Films, 504(1-2), 126, 2006
4 Interface strain profiling in ultrathin SiO2 gate oxides with medium energy ion scattering spectroscopy
Moon DW, Lee HI
Current Applied Physics, 3(1), 45, 2003