화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 TiCN coatings deposited by large area filtered arc deposition technique
Cheng YH, Browne T, Heckerman B
Journal of Vacuum Science & Technology A, 28(3), 431, 2010
2 Effect of high substrate bias and hydrogen and nitrogen incorporation on density of states and field-emission threshold in tetrahedral amorphous carbon films
Panwar OS, Khan MA, Satyanarayana BS, Bhattacharyya R, Mehta BR, Kumar S, Ishpal
Journal of Vacuum Science & Technology B, 28(2), 411, 2010
3 Planarization of high aspect ratio p-i-n diode pillar arrays for blanket electrical contacts
Voss LF, Shao Q, Reinhardt CE, Graff RT, Conway AM, Nikolic RJ, Deo N, Cheung CL
Journal of Vacuum Science & Technology B, 28(5), 916, 2010