화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Electron optics of skewed micro-Einzel lenses
van Bruggen MJ, van Someren B, Kruit P
Journal of Vacuum Science & Technology B, 27(1), 139, 2009
2 Integrated multi-electron-beam blanker array for sub-10-nm electron beam induced deposition
Zhang YX, Heerkens CTH, van Bruggen MJ, Kruit P
Journal of Vacuum Science & Technology B, 24(6), 2857, 2006
3 Development of a multi-electron-beam source for sub-10 nm electron beam induced deposition
van Bruggen MJ, van Someren B, Kruit P
Journal of Vacuum Science & Technology B, 23(6), 2833, 2005