검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
On the influence of gas inlet configuration with respect to homogeneity in a horizontal single wafer MOVPE reactor Hardtdegen H, Kaluza A, Gauer D, vander Ahe M, Grimm M, Kauffmann P, Kadinski L Journal of Crystal Growth, 223(1-2), 15, 2001 |