검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications Jahnel F, von Criegern R Applied Surface Science, 203, 367, 2003 |
| 2 |
Verification of "lateral secondary ion mass spectrometry" as a method for measuring lateral dopant dose distributions in microelectronics test structures von Criegern R, Jahnel F, Lange-Gieseler R, Pearson P, Hobler G, Simionescu A Journal of Vacuum Science & Technology B, 16(1), 386, 1998 |