검색결과 : 1건
No. | Article |
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1 |
Effects of antenna wavenumber spectrum and metal end plate on plasma characteristics excited by helicon wave Shinohara S, Kaneda N, Kawai Y Thin Solid Films, 316(1-2), 139, 1998 |
No. | Article |
---|---|
1 |
Effects of antenna wavenumber spectrum and metal end plate on plasma characteristics excited by helicon wave Shinohara S, Kaneda N, Kawai Y Thin Solid Films, 316(1-2), 139, 1998 |