검색결과 : 1건
No. | Article |
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1 |
Low grain size TiN thin films obtained by low energy ion beam assisted deposition Lopez JM, Gordillo-Vazquez FJ, Bohme O, Albella JM Applied Surface Science, 173(3-4), 290, 2001 |
No. | Article |
---|---|
1 |
Low grain size TiN thin films obtained by low energy ion beam assisted deposition Lopez JM, Gordillo-Vazquez FJ, Bohme O, Albella JM Applied Surface Science, 173(3-4), 290, 2001 |