화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Step free surface heteroepitaxy of 3C-SiC layers on patterned 4H/6H-SiC mesas and cantilevers
Neudeck PG, Powell JA, Trunek AJ, Spry DJ
Materials Science Forum, 457-460, 169, 2004
2 Homoepitaxial'web growth' of SiC to terminate C-axis screw dislocations and-enlarge step-free surfaces
Neudeck PG, Powell JA, Trunek A, Spry D, Beheim GM, Benavage E, Abel P, Vetter WM, Dudley M
Materials Science Forum, 389-3, 251, 2002