검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Performance evaluation of a water mist system in semiconductor wet bench fires Chang WY, Fu PK, Chen CH, Shu YL Process Safety and Environmental Protection, 86(B3), 213, 2008 |
| 2 |
Wet bench reactive hazards of cleaning stages in semiconductor manufacturing processes Peng DJ, Duh YS, Shu CM Journal of Loss Prevention in The Process Industries, 19(6), 743, 2006 |