화학공학소재연구정보센터

Journal of Vacuum Science & Technology A

Journal of Vacuum Science & Technology A, Vol.21, No.5S Entire volume, number list
ISSN: 0734-2101 (Print) 

In this Issue (35 articles)

IV - VI 50 years of science, technology, and the AVS (1953-2003) an introduction
Dylla F, Redhead P
S1 - S6 Measurement of vacuum; 1950-2003
Redhead PA
S7 - S11 Fifty years of vacuum science
Hobson JP
S12 - S14 Vacuum science and technology: 1950-2003
Redhead PA
S15 - S18 Major advances in transfer pumps: 1953-2003
Hablanian MH
S19 - S24 Major advances in capture pumps in the last 50 years
Welch KM
S25 - S33 Development of ultrahigh and extreme high vacuum technology for physics research
Dylla HF
S34 - S35 Surface science 1964-2003
Duke CB
S36 - S41 Inelastic collisions of electrons and positrons in solids and the dawn of surface science
Duke CB
S42 - S53 Growth and trends in Auger-electron spectroscopy and x-ray photoelectron spectroscopy for surface analysis
Powell CJ
S54 - S63 Transition from reciprocal-space to real-space surface science-advent of the scanning tunneling microscope
Lagally MG
S64 - S70 Surface theory moves into the real world
Feibelman PJ
S71 - S73 Transitioning from the art to the science of thin films: 1964 to 2003
Greene JE
S74 - S87 Thin film deposition with physical vapor deposition and related technologies
Rossnagel SM
S88 - S95 Chemical methods of thin film deposition: Chemical vapor deposition, atomic layer deposition, and related technologies
Crowell JE
S96 - S109 Nucleation theory and the early stages of thin film growth
Ratsch C, Venables JA
S110 - S116 Morphological instabilities in thin-film growth and etching
Cahill DG
S117 - S128 Microstructural evolution during film growth
Petrov I, Barna PB, Hultman L, Greene JE
S129 - S130 Plasma science and technology: 50 years of progress
Cecchi JL, Cecchi LM
S131 - S138 Impact of plasma processing on integrated circuit technology migration: From 1 mu m to 100 nm and beyond
Tachi S
S139 - S144 Application-driven development of plasma source technology
Hopwood J, Mantei TD
S145 - S151 Plasma-surface interactions
Chang JP, Coburn JW
S152 - S156 Influence of modeling and simulation on the maturation of plasma technology: Feature evolution and reactor design
Graves DB, Kushner MJ
S157 - S159 Electronic materials and processing: 1979-2003
Brillson LJ
S160 - S166 Electronic materials growth: A retrospective and look forward
Tu CW
S167 - S174 Progress in electronic materials characterization
Holloway PH
S175 - S181 American Vacuum Society leadership in electronic materials processing: Past, present, and future
Lucovsky G, Rubloff G
S182 - S190 Electronic materials theory: Interfaces and defects
Van de Walle CG
S191 - S193 Nanoscience and its relationship to the AVS
Murday JS
S194 - S206 Materials in nanotechnology: New structures, new properties, new complexity
Bonnell DA
S207 - S215 Nanofabrication
Marrian CRK, Tennant DM
S216 - S221 Nanostructure science and technology: Impact and prospects for biology
Craighead HG
S222 - S223 From metallurgical coatings to surface engineering
Sproul WD
S224 - S231 Plasma-based physical vapor deposition surface engineering processes
Matthews A
S232 - S240 Role of third bodies in friction and wear of protective coatings
Singer IL, Dvorak SD, Wahl KJ, Scharf TW