Journal of Vacuum Science & Technology B

Journal of Vacuum Science & Technology B, Vol.15, No.2 Entire volume, number list

ISSN: 1071-1023 (Print)

In this Issue (72 articles)

181 - 185	Identification and Visualization of Questionable Regions in Atomic-Force Microscope Images Leung EC, Markiewicz P, Goh MC
186 - 191	Surface Process and Interaction of Mo Clusters on Highly Oriented Pyrolytic-Graphite Observed by Scanning-Tunneling-Microscopy Xu H, Ng KY
192 - 197	Atomic-Force Microscopic Observation at Initial Growth Stage of Vacuum-Deposited Thin-Film of Polyvinylidenefluoride Seyama H, Maki K, Yamazaki N
198 - 201	Thin-Film Interference Effects in an Off-Axis Illumination System Azuma T, Sato T
202 - 208	Optical-Emission Spectroscopy of High-Density Metal Plasma Formed During Magnetron Sputtering Radzimski ZJ, Hankins OE, Cuomo JJ, Posadowski WP, Shingubara S
209 - 213	Effect of Annealing Temperature on Electrical Stability of Radio-Frequency Magnetron-Sputtered Silicon-Oxides Jelenkovic EV, Tong KY
214 - 220	Chemical Challenge of Submicron Oxide Etching Mcnevin SC, Guinn KV, Taylor JA
221 - 225	Pattern Profile Control of Polysilicon in Magnetron Reactive Ion Etching Kimizuka M, Ozaki Y
226 - 231	Thermal Anneal Activation of Near-Surface Deep-Level Defects in Electron-Cyclotron-Resonance Hydrogen Plasma-Exposed Silicon Nam CW, Ashok S, Sekiguchi T
232 - 236	Influence of Plasma Gas and Postcleaning on the Electrical Characteristics of Plasma-Exposed Al/N-Si Schottky Diodes Kuroda T, Lin ZD, Iwakuro H, Sato S
237 - 240	Copper Dry-Etching with Precise Wafer-Temperature Control Using Cl-2 Gas as a Single Reactant Miyazaki H, Takeda K, Sakuma N, Kondo S, Homma Y, Hinode K
241 - 246	Electrical and Structural Characterization of PtSi/P-Si1-xGex Low Schottky-Barrier Junctions Prepared by Cosputtering Nur O, Willander M, Turan R, Sardela MR, Radamson HH, Hansson GV
247 - 251	Structural Characterization of Thin Ni Films Deposited on (001)ZnSe Ruvimov S, Lilientalweber Z, Bourret ED, Swider W, Washburn J, Duxstad KJ, Haller EE
252 - 258	Metal-Insulator-Semiconductor Structure on GaAs Using a Pseudomorphic Si/Gap Interlayer Park DG, Mohammad SN, Chen Z, Morkoc H
259 - 266	Physical-Properties and Microelectronic Applications of Low Permittivity Fluoromethylene Cyanate Ester Resins Buckley LJ, Snow AW
267 - 272	Etching and Boron-Diffusion of High-Aspect-Ratio Si Trenches for Released Resonators Weigold JW, Juan WH, Pang SW
273 - 276	Lateral Range Spread of MeV Phosphorus Ions Implanted in Silicon Measured by Time-of-Flight Secondary-Ion Mass-Spectrometry Shi BR, Cue N, Smith TL, Xu TB
277 - 281	Thermal-Desorption Spectroscopy and Molecular-Beam Time-of-Flight Studies of Silicon-Wafer Ultraviolet/Ozone Cleaning Yamaguchi K, Uematsu Y, Ikoma Y, Watanabe F, Motooka T, Igarashi T
282 - 286	Spark-Gap Atomic-Emission Microscopy .2. Improvements in Resolution Vanpatten PG, Noll JD, Myrick ML
287 - 292	Generation of Diffraction-Free Beams for Applications in Optical Microlithography Erdelyi M, Horvath ZL, Szabo G, Bor Z, Tittel FK, Cavallaro JR, Smayling MC
293 - 298	Fabrication and Analysis of Extreme-Ultraviolet Reflection Masks with Patterned W/C Absorber Bilayers Voorma HJ, Louis E, Koster NB, Bijkerk F, Zijlstra T, Degroot LE, Rousseeuw BA, Romijn J, Vanderdrift EW, Friedrich J
299 - 305	New Deep-Ultraviolet Positive Photoresists .2. Copolymers of P-Trimethylsilylstyrenes and Acrylics Chiang WY, Shann HD
306 - 310	Novel Electron-Beam Lithography Technique for Submicron T-Gate Fabrication Ahmed MM, Ahmed H
311 - 315	Quantitative Measurement of the Resist Heating in a Variable Shaped Electron Lithography Babin S, Hudek P, Kostic I
316 - 320	Molecular-Beam Epitaxy of Highly Mismatched In0.73Ga0.27As on InP for Near-Infrared Photodetectors Kochhar R, Hwang WY, Micovic M, Mayer TS, Miller DL, Lord SM
321 - 324	InAs Room-Temperature Infrared Photoconductive Detectors Grown by Molecular-Beam Epitaxy Liu BD, Lin RM, Lee SC, Sun TP
325 - 328	Surface Decontamination of Patterned GaAs Substrates for Molecular-Beam Epitaxy Regrowth Using a Hydrogen Radical Source Burke TM, Quierin MA, Grimshaw MP, Ritchie DA, Pepper M, Burroughes JH
329 - 336	Substrate-Temperature Measurement by Absorption-Edge Spectroscopy During Molecular-Beam Epitaxy of Narrow-Band Gap Semiconductor-Films Delyon TJ, Roth JA, Chow DH
337 - 342	Theoretical-Analysis of Field-Emission from a Metal Diamond Cold-Cathode Emitter Lerner P, Cutler PH, Miskovsky NM
343 - 348	Fabrication of Arrayed Glassy-Carbon Field Emitters Sohda Y, Tanenbaum DM, Turner SW, Craighead HG
349 - 360	Sensor Nanofabrication, Performance, and Conduction Mechanisms in Scanning Thermal Microscopy Luo K, Shi Z, Varesi J, Majumdar A
361 - 368	Multiparameter Grating Metrology Using Optical Scatterometry Raymond CJ, Murnane MR, Prins SL, Sohail S, Naqvi H, Mcneil JR, Hosch JW
369 - 372	A Simple Fabrication Method for Nanometer-Scale Thin-Metal Stencils Zimmerman NM
373 - 373	Scaling of Si and GaAs Trench Etch Rates with Aspect Ratio, Feature Width, and Substrate-Temperature (Vol 13, Pg 92, 1995) Bailey AD, Vandesanden MC, Gregus JA, Gottscho RA
383 - 383	Papers from the 9th-International-Vacuum-Microelectronics-Conference - Preface Fursey GN, Glazanov DV, Fletcher LA
385 - 390	Microtips and Resistive Sheet - A Theoretical Description of the Emissive Properties of This System Baptist R, Bachelet F, Constancias C
391 - 393	Simulation of Field-Emission and Electrodynamic Characteristics for Triode Near-Cathode Modulators with Edge Field Emitter Arrays Zakharchenko YF, Sinitsyn NL, Gulyaev YV
394 - 397	Numerical Modeling of the Disk-Edge Field Emitter Triode Wang C, Wang BP, Zhao HW, Sin JK, Poon MC
398 - 400	Hot-Electron and Quasi-Ballistic Transport of Nonequilibrium Electrons in Diamond Thin-Films Lerner P, Cutler PH, Miskovsky N
401 - 404	Effects of Vacuum Conditions on Low-Frequency Noise in Silicon Field-Emission Devices Trujillo JT, Chakhovskoi AG, Hunt CE
405 - 409	Modulation of the Current in a Field Emitter Caused by a Continuous-Wave or Pulsed-Laser - Simulations and Experimental Results Hagmann MJ, Brugat M
410 - 421	Field-Emission Processes from a Liquid-Metal Surface Fursey GN, Shirochin LA, Baskin LM
422 - 424	Work Function Estimate for Electrons Emitted from Nanotube Carbon Cluster Films Gulyaev YV, Sinitsyn NI, Torgashov GV, Mevlyut ST, Zhbanov AI, Zakharchenko YF, Kosakovskaya ZY, Chernozatonskii LA, Glukhova OE, Torgashov IG
425 - 427	Fabrication and Field-Emission Study of Gated Diamond-Like-Carbon-Coated Silicon Tips Lee S, Ju BK, Lee YH, Jeon D, Oh MH
428 - 430	Relationship Between Field-Emission Characteristics and Hydrogen Content in Diamond-Like Carbon Deposited by the Layer-by-Layer Technique Using Plasma-Enhanced Chemical-Vapor-Deposition Park KC, Moon JH, Chung SJ, Oh MH, Milne WI, Jang J
431 - 433	Field-Emission Properties of Ta-C Films with Nitrogen Doping Park KC, Moon JH, Chung SJ, Jung JH, Ju BK, Oh MH, Milne WI, Han MK, Jang J
434 - 438	Low-Temperature Reactive Ion Etching of Silicon with SF6/O-2 Plasmas Wells T, Elgomati MM, Wood J
439 - 441	Layered Structures with Delta-Doped Layers for Enhancement of Field-Emission Evtukh AA, Litovchenko VG, Marchenko RI, Kydzinovski SY
442 - 445	Diamond Cold Cathodes for Electron Guns Givargizov EI, Zhirnov VV, Chubun NN, Voronin AB
446 - 449	Emission Characterization of Diamond-Coated Si Field-Emission Arrays Zhirnov VV, Givargizov EI, Kandidov AV, Seleznev BV, Alimova AN
450 - 453	Fabrication of Field-Emission Display Prototype Based an Si Field-Emission Arrays with Diamond Coating Givargizov EI, Zhirnov VV, Chubun NN, Stepanova AN
454 - 456	Field-Emission of Nitrogen-Doped Diamond-Like Carbon-Films Deposited by Plasma-Enhanced Chemical-Vapor-Deposition Park KC, Moon JH, Chung SJ, Jang J
457 - 459	Self-Aligned Silicon Tips Coated with Diamond-Like Carbon Lee S, Lee S, Lee S, Jeon D, Lee KR
460 - 463	Physical Characterization of Diamond Pyramidal Microtip Emitters Kang WP, Davidson JL, George MA, Milosavljevic I, Li Q, Xu JF, Kerns DV
464 - 467	Fabrication and Characterization of Volcano-Shaped Field Emitters Surrounded by Planar Gates Lee CG, Park BG, Lee JD
468 - 471	Fabrication of Metal Field Emitter Arrays on Polycrystalline Silicon Kim IH, Lee CG, Kim YH, Park BG, Lee JD
472 - 476	Process Design and Emission Properties of Gated N(+) Polycrystalline Silicon Field Emitter Arrays for Flat-Panel Display Applications Uh HS, Kwon SJ, Lee JD
477 - 481	Anodic Bonding Technique Under Low-Temperature and Low-Voltage Using Evaporated Glass Choi WB, Ju BK, Lee YH, Haskard MR, Sung MY, Oh MH
482 - 487	Surface Modification by the Voltage Pulse in a Scanning Tunneling Microscope Vladimirov GG, Drozdov AV
488 - 490	Fully Large-Scale Integration-Process-Compatible Si Field Emitter Technology with High Controllability of Emitter Height and Sharpness Takemura H, Furutake N, Nisimura M, Tsuida S, Yoshiki M, Okamoto A, Miyano S
491 - 494	Dual Scanning Tunneling Microscope Mode of the Surface-Diffusion Metal-Ion Source - Li Transfer and Scanning Gupalo MS, Yarish IL, Zlupko VM, Suchorski Y
495 - 498	Atom-Probe Determination of the Multicomponent Material Thermo-Field Microprotrusion Parameters Kontorovich EL, Loginov MV, Shrednik VN
499 - 502	Emission Characteristic of Diamond-Tip Field Emitter Arrays Fabricated by Transfer Mold Technique Kim S, Ju BK, Lee YH, Park BS, Baik YJ, Lim S, Oh MH
503 - 506	Experimental-Study of Matrix Carbon Field-Emission Cathodes and Computer-Aided-Design of Electron Guns for Microwave-Power Devices, Exploring These Cathodes Grigoriev YA, Petrosyan AI, Penzyakov VV, Pimenov VG, Rogovin VI, Shesterkin VI, Kudryashov VP, Semyonov VC
507 - 511	Characterization of Novel Powder and Thin-Film RGB Phosphors for Field-Emission Display Application Chakhovskoi AG, Hunt CE, Malinowski ME, Felter TE, Talin AA
512 - 515	Thin-Film Phosphor Prepared by Physical Vapor-Deposition for Field-Emission Display Application Lee YH, Song MH, Ju BK, Shin DK, Oh MH
516 - 519	Phosphor Challenge for Field-Emission Flat-Panel Displays Hunt CE, Chakhovskoi AG
520 - 523	Optical Characteristics of the Phosphor Screen in Field-Emission Environments Kang SW, Jeon BS, Yoo JS, Lee JD
524 - 527	Development of 4-in Field-Emission Displays Gorfinkel B, Kim JM
528 - 532	Reliability-Analysis of 4-in Field-Emission Display Kim JM, Hong JP, Kim JW, Choi JH, Park NS, Kang JH, Jang JE, Ryu YS, Yang HC
533 - 534	Distributed Generator with Extended Interaction on Field Emitter Arrays Zakharchenko YF, Sinitsyn NI, Gulyaev YV
535 - 538	Characterization of Lateral Thin-Film-Edge Field Emitter Arrays Johnson BR, Akinwande AI, Murphy D