Journal of Vacuum Science & Technology B

Journal of Vacuum Science & Technology B, Vol.26, No.2 Entire volume, number list

ISSN: 1071-1023 (Print)

In this Issue (80 articles)

445 - 457	Characterization of semiconducting polymers for thin film transistors Chabinyc ML
458 - 480	Nanoimprint lithography: An old story in modern times? A review Schift H
481 - 486	Fabrication process for cantilevers with integrated tunnel junctions Tanner SM, Rogers CT
487 - 494	SiC via fabrication for wide-band-gap high electron mobility transistor/microwave monolithic integrated circuit devices Voss LF, Ip K, Peartona SJ, Shul RJ, Overberg ME, Baca AG, Sanchez C, Stevens J, Martinez M, Armendariz MG, Wouters GA
495 - 501	Optical and electrical properties of amorphous zinc tin oxide thin films examined for thin film transistor application Jayaraj MK, Saji KJ, Nomura K, Kamiya T, Hosono H
502 - 505	Improvement on cold carbon field-electron emitter for commercial x-ray tube Lv QN, Wang DA, Li TX, Ju ZM, Liu GY, Xia SH, Ding YG, Li HY
506 - 513	The effect of added salts on the optical properties of water for high index immersion lithography fluids Taylor JC, Costner EA, Goh S, Wojtczak W, Dewulf D, Willson CG
514 - 517	Multilayer soft mold for UV imprinting the 50 nm pitch dot array Lee D, Cho EH, Kim HS, Lee BK, Lee MB, Sohn JS, Lee CH, Suh SJ
518 - 524	Electrical biasing and time dependent evolution of defects in poly(triphenylamine)-butane vinyl organic semiconductor devices Devine RAB, Wang F, Rauh RD
525 - 533	Defects in CdHgTe grown by molecular beam epitaxy on, (211)B-oriented CdZnTe substrates Selvig E, Tonheim CR, Kongshaug KO, Skauli T, Hemmen H, Lorentzen T, Haakenaasen R
534 - 540	Optimization of resolution-enhancement technology and dual-layer bottom-antireflective coatings in hypernumerical aperture lithography Li Y, Zhou Y
541 - 550	Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout Cocuzza M, Ferrante I, Ricci A, Giuri E, Scaltrito L, Bich D, Merialdo A, Schina P, Correale R
551 - 558	Effects of Mo seeding on the formation of Si nanodots during low-energy ion bombardment Ozaydin G, Ludwig KF, Zhou H, Headrick RL
559 - 565	Electrical properties of conductive and resistive ZnSe layers Oh DC, Im IH, Park SH, Hanada T, Yao T, Song JS, Chang JH, Makino H, Han CS, Koo KH
566 - 575	Field emission from as grown and nitrogen incorporated tetrahedral amorphous carbon/silicon heterojunctions grown using a pulsed filtered cathodic vacuum arc technique Panwar OS, Rupesinghe N, Amaratunga GAJ
576 - 581	Comparison of deep silicon etching using SF6/C4F8 and SF6/C4F6 plasmas in the Bosch process Rhee H, Kwon H, Kim CK, Kim H, Yoo J, Kim YW
582 - 584	High-aspect-ratio nanopillar structures fabricated by nanoimprinting with elongation phenomenon Kuwabara K, Miyauchi A
585 - 588	Indium-doped ZnO nanospirals synthesized by thermal evaporation Gao H, Ji H, Zhang X, Lu H, Liang Y
589 - 592	Route to production of suspended perforated membranes Burckel DB, Brueck SRJ
593 - 597	Fabrication of suspended dielectric mirror structures via xenon difluoride etching of an amorphous germanium sacrificial layer Cole GD, Behymer E, Goddard LL, Bond TC
598 - 605	Simulation study on stress and deformation of polymeric patterns during the demolding process in thermal imprint lithography Song Z, Choi J, You BH, Lee J, Park S
606 - 610	Patterning chalcogenide glass by direct resist-free thermal nanoimprint Solmaz M, Park H, Madsen CK, Cheng X
611 - 617	Assessment of the performance of scanning capacitance microscopy for n-type gallium nitride Sumner J, Oliver RA, Kappers MJ, Humphreys CJ
618 - 623	Comparative study on temperature-dependent characteristics of InP/InGaAs single- and double-heterojunction bipolar transistors Chen WH, Chen TP, Lee CJ, Hung CW, Chu KY, Chen LY, Tsai TH, Liu WC
624 - 626	Optimization of electrical characteristics of gadolinium (Gd2O3) incorporated HfO2GaAs n-type metal-oxide semiconductor capacitors with silicon-interface-passivation layer Il Park S, Ok I, Kim HS, Zhu F, Zhang M, Yum JH, Han Z, Lee JC
627 - 631	Characteristics of an InGaP/AlXGa1-XAs/GaAs composite-emitter heterojunction bipolar transistor (CEHBT) Cheng SY, Chu KY, Chen LY, Chen LA, Liu WC
632 - 635	Three-dimensional metal patterning over nanostructures by reversal imprint Peng C, Cardozo BL, Pang SW
636 - 642	Effect of growth temperature on InGaSb metamorphic layers and the fabrication of InGaSb p-i-n diodes Mohammedy FM, Hulko O, Robinson BJ, Thompson DA, Deen MJ
643 - 650	Novel method for measuring nanofriction by atomic force microscope Salvadori MC, Lisboa FS, Fernandes FM, Brown IG
651 - 654	Enhanced growth of anodic alumina nanochannels on Ga-ion pre-irradiated aluminum Liu CY, Datta A, Liu NW, Wu YR, Wang HH, Chuang TH, Wang YL
655 - 660	Electron optics of microlenses with inclined beams Zhang Y, Barth JE, Kruit P
661 - 665	Picocalorimetric method for DNA sequencing Esfandyarpour H, Fabian R, Pease W, Davis RW
666 - 674	Sidewall passivation assisted by a silicon coverplate during Cl-2-H-2 and HBr inductively coupled plasma etching of InP for photonic devices Bouchoule S, Patriarche G, Guilet S, Gatilova L, Largeau L, Chabert P
675 - 677	Synthesis of epitaxial silicon nanowires on Si(111) substrates using ultrahigh vacuum magnetron sputtering Zhao XW, Yang FY
678 - 681	Ta nanotubes grown by glancing angle deposition Kesapragada SV, Sotherland PR, Gall D
682 - 685	Deep-UV exposure of poly(methyl methacrylate) at 254 nm using low-pressure mercury vapor lamps Johnstone RW, Foulds IG, Parameswaran M
686 - 686	An international journal devoted to Microelectronics and Nanometer Structures - Processing, measurement, and phenomena - Preface Busta HH
689 - 693	Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer Bin Cho J, Lee S, Yoon HJ, Yang SS, Koh KH
694 - 697	Injection-locked millimeter wave oscillator based on field-emission cathodes Lin MC, Lu PS
698 - 701	Fabrication of field-emission cathode ray tube with a unique nanostructure carbon electron emitter Wang HX, Jiang N, Hiraki H, Harada Y, Zhang H, Wang J, Haba M, Hiraki A
702 - 705	Development of high spatial resolution x-ray radiography system equipped with multiwalled carbon nanotube field emission cathode Yabushita R, Hata K
706 - 710	Carbon nanotube cold cathodes for application in low current x-ray tubes Tolt ZL, Mckenzie C, Espinosa R, Snyder S, Munson M
711 - 715	Development of a super-high-sensitivity image sensor using 640x480 pixel active-matrix high-efficiency electron emission device Negishi N, Sato T, Matsuba Y, Tanaka R, Nakada T, Sakemura K, Okuda Y, Watanabe A, Yoshikawa T, Ogasawara K, Nanba M, Okazaki S, Tanioka K, Egami N, Koshida N
716 - 719	Characteristics of nanosilicon ballistic cold cathode in aqueous solutions as an active electrode Ohta T, Gelloz B, Koshida N
720 - 723	Evidence of electronic cooling from resonance states of nanocrystalline graphite field emitters Busta H, Tao K, Feinerman A
724 - 729	Field emission at nanometer distances for high-resolution positioning le Febre AJ, Abelmann L, Lodder JC
730 - 734	Combined x-ray photoelectron spectroscopy/ultraviolet photoelectron spectroscopy/field emission spectroscopy for characterization of electron-emission mechanism of diamond Yamaguchi H, Kudo Y, Masuzawa T, Kudo M, Yamada T, Takakuwa Y, Okano K
735 - 737	Scanning atom probe study of graphite nanofibers Nishikawa O, Taniguchi M, Ushirozawa M
738 - 744	Thermal-field treatment for creating single-crystal tungsten tips with ultimate sharpness Fujita S, Shimoyama H
745 - 750	Multi-walled nanotube polymer composite degradation under high emission current regime as revealed by mass spectrometry Popov EO, Pashkevich AA, Pozdnyakov AO, Pozdnyakov OF
751 - 754	Modification of the field enhancement factor for a field emitter with a surrounding electrode stabilized using a field effect transistor Neo Y, Matsumoto T, Shimawaki H, Mimura H, Yokoo K
755 - 759	Polymer embedded C nanopearls field emission cathodes for time of flight mass spectrometers Mouton R, Semet V, Kilgour D, Brookes MD, Binh VT
760 - 763	Relationship between field-emission characteristics and defects measured by Raman scattering in carbon-nanotube cathodes treated by plasma and laser Kim WS, Oki H, Kinoshita A, Murakami K, Abo S, Wakaya F, Takai M
764 - 769	Field emission characteristics of a lanthanum monosulfide cold cathode array fabricated using microelectromechanical systems technology Samiee M, Garre K, Cahay M, Kosel PB, Fairchild S, Fraser JW, Lockwood DJ
770 - 777	One-dimensional combined field and thermionic emission model and comparison with experimental results He X, Scharer J, Booske J, Sengele S
778 - 781	Field electron emission from free-standing flexible PDMS-supported carbon-nanotube-array films Hong NT, Yim JH, Koh KH, Lee S, Minh PN, Khoi PH
782 - 787	Electron-emission properties of silicon field-emitter arrays in gaseous ambient for charge-compensation device Takeuchi M, Kojima T, Oowada A, Gotoh Y, Nagao M, Tsuji H, Ishikawa J, Sakai S, Kimoto T
788 - 793	Physics of generalized Fowler-Nordheim-type equations Forbes RG
794 - 799	Possibility of generating terahertz radiation by photomixing with clusters of carbon nanotubes Hagmann MJ
800 - 805	Energy exchange in field emission from semiconductors Chung MS, Jang YJ, Mayer A, Cutler PH, Miskovsky NM, Weis BL
806 - 812	Modeling of linear carbon nanotube nanotriodes with improved field uniformity Nicolaescu D, Filip V, Gotoh Y, Ishikawa J
813 - 820	Electroluminescence of silicon nanoclusters excited by tunneling carrier injection Filip V, Wong H, Wong CK, Nicolaescu D
821 - 825	Work functions of cathode surfaces with adsorbed atoms based on ab initio calculations Lin MC, Jao RF, Lin WC
826 - 830	Fitting nonlinear Fowler-Nordheim plots of field emission strips with a self-consistent parallel plane model Lin MC, Liao YH
831 - 837	Application of a general electron emission equation to surface nonuniformity and current density variation Jensen KL, Petillo JJ, Montgomery EJ, Pan ZG, Feldman DW, O'Shea PG, Moody NA, Cahay M, Yater JE, Shaw JL
838 - 841	Toward a lateral carbon nanotube based field emission triode Monica AH, Paranjape M, Coles GL, Papadakis SJ, Osiander R
842 - 846	In situ field emission characterization of multiwalled carbon nanotubes Smith RC, Cox DC, Silva SRP
847 - 850	Field emission properties of single-walled carbon nanotube with amphoteric doping by encapsulation of TTF and TCNQ Lee J, Lee W, Sim K, Han SH, Yi W
851 - 855	Fabrication of transparent single wall carbon nanotube films with low sheet resistance Yim JH, Kim YS, Koh KH, Lee S
856 - 859	Effect of electrical aging on field emission from carbon nanotube field emitter arrays Ryu JH, Kim KS, Lee CS, Jang J, Park KC
860 - 863	Improving the electron emission properties of ion-beam-synthesized Ag-SiO2 nanocomposites by pulsed laser annealing Tsang WM, Adikaari AADT, Stolojan V, Silva SRP
864 - 867	Improvement of emission efficiency of nanocrystalline silicon planar cathodes Shimawaki H, Neo Y, Mimura H, Murakami K, Wakaya F, Takai M
868 - 871	Cold field emission from HfC(310) Kagarice KJ, Magera GG, Pollard SD, Mackie WA
872 - 875	Improved field emission characteristics of individual carbon nanotube coated with boron nitride nanofilm Morihisa Y, Kimura C, Yukawa M, Aoki H, Kobayashi T, Hayashi S, Akita S, Nakayama Y, Sugino T
876 - 879	Extension of lifetime of silicon field emitter arrays in oxygen ambient by carbon negative ion implantation Oowadaa A, Takeuchi M, Sakai Y, Gotoh Y, Nagao M, Tsuji H, Ishikawa J, Sakai S, Kimoto T
880 - 884	Density control of carbon nanofibers on titanium buffer layer using electroplated Ni catalyst Yoo HS, Lee SJ, Joo SK, Sung WY
885 - 890	Field emission properties of metallic nanostructures self-assembled on nanoporous alumina and silicon templates Cahay M, Garre K, Fraser JW, Lockwood DJ, Semet V, Binh VT, Kanchibotla B, Bandyopadhyay S, Grazulis L, Das B
891 - 897	Field emission from lanthanum monosulfide thin films grown on the (100) magnesium oxide substrates Fairchild S, Cahay M, Grazulis L, Garre K, Wu X, Lockwood DJ, Semet V, Binh VT
L23 - L27	Fabrication and characterization of InGaAsP/InP double shallow-ridge rectangular ring laser photonic integration circuits by cascade reactive ion etching/inductively coupled plasma etching Zhang R, Ren Z, Yu S
L28 - L31	Fabrication of nanopores with subnanometer precision on poly(methyl methacrylate) nanofibers by in situ electron beam irradiation Duan HG, Xie EQ, Han L