Journal of Vacuum Science & Technology B

Journal of Vacuum Science & Technology B, Vol.25, No.4 Entire volume, number list

ISSN: 1071-1023 (Print)

In this Issue (76 articles)

L23 - L26	Band gap narrowing of ZnO : N films by varying rf sputtering power in O-2/N-2 mixtures Ahn KS, Yan Y, Ai-Jassim M
L27 - L30	Glass nanostructures fabricated by soft thermal nanoimprint Peroz C, Heitz C, Barthel E, Sondergard E, Goletto V
L31 - L34	Nanoimprint fabrication of polymer cell substrates with combined microscale and nanoscale topography Eliason MT, Charest JL, Simmons BA, Garcia AJ, King WP
L35 - L38	Polymer through-hole membrane fabricated by nanoimprinting using metal molds with high aspect ratios Yanagishita T, Nishio K, Masuda H
1123 - 1138	Long-term stability of Ru-based protection layers in extreme ultraviolet lithography: A surface science approach Over H, He YB, Farkas A, Mellau G, Korte C, Knapp M, Chandhok M, Fang M
1139 - 1142	Etching SiO2 with HF/pyridine-supercritical carbon dioxide solutions and resultant interfacial electronic properties Li YX, Yang D, Jones CA, DeSimone JM, Irene EA
1143 - 1146	Adsorption mechanism of aligned single wall carbon nanotubes at well defined metal surfaces Clair S, Rabot C, Kim Y, Kawai M
1147 - 1151	Ultrahigh-resolution pattern using electron-beam lithography HF wet etching Tiron R, Mollard L, Louveau O, Lajoinie E
1152 - 1155	Influence of substrate morphology on growth mode of thin organic films: An atomic force microscopy study Ribic PR, Bratina G
1156 - 1160	Direct-write trilayer technology for Al-Al2O3-Cu superconductor-insulator-normal metal tunnel junction fabrication Otto E, Tarasov M, Kuzmin L
1161 - 1165	Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma Ren Z, Heard PJ, Yu S
1166 - 1170	Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma Biasotto C, Daltrini AM, Teixeira RC, Boscoli FA, Diniz JA, Moshkalev SA, Doi I
1171 - 1174	Microfluidic encapsulated nanoelectromechanical resonators Aubin KL, Huang J, Park SM, Yang Y, Kondratovich M, Craighead HG, Ilic BR
1175 - 1178	Influence of field emission on agglomerated carbon nanotubes in pastes Lee YD, Lee HJ, Lee YH, Ju BK
1179 - 1185	Adhesion between template materials and UV-cured nanoimprint resists Houle FA, Guyer E, Miller DC, Dauskardt R
1186 - 1190	Resonant cavity enhanced InAs/In0.15Ga0.85As dots-in-a-well quantum dot infrared photodetector Attaluri RS, Shao J, Posani KT, Lee SJ, Brown JS, Stintz A, Krishnaa S
1191 - 1196	Synthesis of carbon nanotubes: Controlled fabrication of intraconnects Katz D, Lee SW, Lopez D, Kornblit A, Grebel H
1197 - 1202	Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials Ho YLD, Gibson R, Hu CY, Cryan MJ, Rarity JG, Heard PJ, Timpson JA, Fox AM, Skolnick MS, Hopkinson M, Tahraoui A
1203 - 1206	Thermal stability of rare-earth based ultrathin Lu2O3 for high-k dielectrics Darmawan P, Lee PS, Setiawan Y, Lai JC, Yang P
1207 - 1216	Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110) Tiggelaar RM, Berenschot JW, Elwenspoek MC, Gardeniers JGE, Dorsman R, Kleijn CR
1217 - 1220	Epitaxial growth of (FeCo)(x)Ge1-x(001) He L, Collins BA, Tsui F, Zhong Y, Vogt S, Chu YS
1221 - 1226	Conducting properties of suspended carbon nanotubes grown by thermal chemical vapor deposition Li TL, Ting JH, Yang BZ
1227 - 1230	Conformal metal thin-film coatings in high-aspect-ratio trenches using a self-sputtered rf-driven plasma source Ji L, Kim JK, Ji Q, Leung KN, Chen Y, Gough RA
1231 - 1235	Electrical characterization of Pt/AlGaN/GaN Schottky diodes grown using AlN template and their application to hydrogen gas sensors Miyoshi M, Kuraoka Y, Asai K, Shibata T, Tanaka M
1236 - 1243	Ar+ bombardment of 193 nm photoresist: Morphological effects Pargon E, Nest D, Graves DB
1244 - 1248	Low power and high speed phase-change memory devices with silicon-germanium heating layers Lee SY, Yoon SM, Park YS, Yu BG, Kim SH, Lee SH
1249 - 1252	Field emission from randomly oriented ZnO nanowires Chang YQ, Chen KH, Zhang HZ, Qiang WJ, Long Y
1253 - 1260	Capacitive and analytical approaches for the analysis of field emission from carbon nanotubes in a sphere-to-plane diode Boscolo I, Cialdi S, Fiori A, Orlanducci S, Sessa V, Terranova ML, Ciorba A, Rossi M
1261 - 1264	Growth of carbon nanotubes with resist-assisted patterning process Park KC, Ryu JH, Kim KS, Yu YY, Jang J
1265 - 1269	Dual-metal-gate-integration complementary metal oxide semiconductor process scheme using Ru positive-channel metal oxide semiconductor and TaC negative-channel metal oxide semiconductor gate electrodes Chang WT, Hsieh TE, Lee CJ
1270 - 1275	Fermi gas energetics in low-dimensional metals of special geometry Tavkhelidze A, Svanidze V, Noselidze I
1276 - 1279	Instability of junctions formed by low energy B implant and low temperature solid phase epitaxy growth Zhu L, Martin M, Hollander M, Wang YQ, Chen Q, Ma K, Yu XK, Liu JR, Chu WK, Shao L
1280 - 1283	Current spreading of III-nitride light-emitting diodes using plasma treatment Lee HY, Pan KH, Lin CC, Chang YC, Kao FJ, Lee CT
1284 - 1287	High-performance, low-noise enhancement-mode pseudomorphic high-electron-mobility transistor with gate recession by citric acid/hydrogen peroxide selective etching Wang CC, Lin YJ, Huang HK, Wu CL, Chang CS, Wang YH
1288 - 1297	Multiplexed mass spectrometry for real-time sensing in a spatially programmable chemical vapor deposition reactor Cai Y, Henn-Lecordier L, Rubloff GW, Sreenivasan R, Choo JO, Adomaitis RA
1298 - 1304	Ultrathin decoupled plasma nitridation SiON gate dielectrics prepared with various rf powers Hu CY, Chen SC, Chen JF, Chang SJ, Wang MH, Yeh V, Chen JC
1305 - 1309	Enhanced electrical and structural properties of stacked AlON/HfO2 gate oxides on p-type Si substrates Choi W, Lee J, Yang J, Kim J, Hong J
1310 - 1314	Observation of fringelike electron-emission pattern in field emission from Pt field emitter fabricated by electron-beam-induced deposition Murakami K, Wakaya F, Takai M
1315 - 1320	Fabrication of complementary metal-oxide-semiconductor compatible semiconducting yttrium barium copper oxide uncooled infrared microbolometer arrays Kumar S, Chitteboyina MM, Butler DP
1321 - 1326	Microstructuring by microcontact printing and selective surface dewetting Benor A, Wagner V, Knipp D
1327 - 1335	Fabrication and characterization of Si nanocrystals in SiC matrix produced by magnetron cosputtering Song D, Cho EC, Conibeer G, Cho YH, Huang Y, Huang S, Flynn C, Green MA
1336 - 1339	Evaluation of new materials for plasmonic imaging lithography at 476 nm using near field scanning optical microscopy Backer SA, Suez I, Fresco ZM, Frechet JMJ, Conway JA, Vedantam S, Lee H, Yablonovitch E
1340 - 1352	Analytic description of scanning capacitance microscopy Murray H, Germanicus R, Doukkali A, Martin P, Domenges B, Descamps P
1353 - 1364	Plasma-surface interactions of model polymers for advanced photoresists using C4F8/Ar discharges and energetic ion beams Engelmann S, Bruce RL, Kwon T, Phaneuf R, Oehrlein GS, Bae YC, Andes C, Graves D, Nest D, Hudson EA, Lazzeri P, Lacob E, Anderle M
1365 - 1375	Development of certified reference materials of ion-implanted dopants in silicon for calibration of secondary ion mass spectrometers Simons DS, Downing RG, Lamaze GP, Lindstrom RM, Greenberg RR, Paul RL, Schiller SB, Guthrie WF
1376 - 1381	High aspect ratio Bosch etching of sub-0.25 mu m trenches for hyperintegration applications Wang X, Zeng W, Lu G, Russo OL, Eisenbraun E
1382 - 1388	1.3 mu m Ga0.11In0.89As0.24P0.76/Ga0.27In0.73As0.67P0.33 compressive-strain multiple quantum well with n-type modulation-doped GalnP intermediate-barrier laser diodes Lei PH
1389 - 1392	Investigation of heteroepitaxial growth of magnetite thin films Sterbinsky GE, Cheng J, Chiu PT, Wessels BW, Keavney DJ
1393 - 1397	Precise patterning of SiO2-based glass by low-temperature nanoimprint lithography assisted by UV irradiation on both faces using Glasia (R) Okinaka M, Tsushima H, Ichinose Y, Watanabe E, Yanagisawa K, Tsukagoshi K, Aoyagi Y
1398 - 1404	Real-time in situ flux monitoring in molecular beam epitaxy by wavelength-modulated atomic absorption spectroscopy Vignaud D
1405 - 1411	Role of subsurface defects in metal-ZnO(0001) Schottky barrier formation Mosbacker HL, El Hage S, Gonzalez M, Ringel SA, Hetzer M, Look DC, Cantwell G, Zhang J, Song JJ, Brillson LJ
1412 - 1415	Simple "solutal" method for preparing Teflon nanostructures and molds Kim MJ, Park JE, Song S, Lee HH
1416 - 1419	Highly selective isotropic dry etch based nanofabrication Hussain MM, Gebara G, Sassman B, Lanee S, Larson L
1420 - 1423	Extreme high vacuum field emission microscope for study on the inherent fluctuation of field emission Cho B, Itagaki T, Ishikawa T, Rokuta E, Oshima C
1426 - 1426	Papers from the 34th Annual Conference on the Physics and Chemistry of Semiconductor Interfaces - Preface Rowe J
1427 - 1431	Analysis of local carrier modulation in InAs semiconductor nanowire transistors Zhou X, Dayeh SA, Wang D, Yu ET
1432 - 1436	Transport properties of InAs nanowire field effect transistors: The effects of surface states Dayeh SA, Soci C, Yu PKL, Yu ET, Wang D
1437 - 1440	Influence of interface roughness on quantum transport in nanoscale FinFET Khan H, Mamaluy D, Vasileska D
1441 - 1447	Binding energy, vapor pressure, and melting point of semiconductor nanoparticles Farrell HH, Van Siclen CD
1448 - 1452	Initial stages of GaP heteroepitaxy on nanoscopically roughened (001)SI Liu X, Kim IK, Aspnes DE
1453 - 1459	Atomic ordering and interlayer diffusion Of Co2FeSi films grown on GaAs(001) studied by transmission electron microscopy Hashimoto M, Trampert A, Herfort J, Ploog KH
1460 - 1466	Structural, optical, and magnetic properties of (Ga,Mn)As/AlAs multiple quantum well structures Ploog KH, Trampert A, Brandt O, Sapega VF
1467 - 1469	Growth of and optical emission from GaMnAs thin films grown by molecular beam epitaxy Xu JF, Liu SW, Xiao M, Thibado PM
1470 - 1475	Magnetostructure of MnAs on GaAs revisited Bauer E, Belkhou R, Cherifi S, Locatelli A, Pavlovska A, Rougemaille N
1476 - 1480	Anomalous Mn depth profiles for GaMnAs/GaAs(001) thin films grown by molecular beam epitaxy Xu JF, Thibado PM, Awo-Affouda C, Ramos F, LaBella VP
1481 - 1490	Formation of ultrathin SiNx/Si interface control double layer on (001) and (111) GaAs surfaces for ex situ,deposition of high-k dielectrics Akazawa M, Hasegawa H
1491 - 1494	Metal gate HfO2 metal-oxide-semiconductor structures on InGaAs substrate with varying Si interface passivation layer and postdeposition anneal condition Ok I, Kim H, Zhang M, Zhu F, Park S, Yum J, Koveshnikov S, Tsai W, Tokranov V, Yakimov M, Oktyabrsky S, Lee JC
1495 - 1503	Hydrogen sensing characteristics and mechanism of Pd/AlGaN/GaN Schottky diodes subjected to oxygen gettering Hasegawaa H, Akazawa M
1504 - 1510	Functionalization and characterization of InAs and InP surfaces with hemin Garcia MA, Losurdo M, Wolter SD, Kim TH, Lampert WV, Bonaventura J, Bruno G, Giangregorio M, Brown A
1511 - 1515	Atomic structure of Si(5512)-2X1: Confirmation of the structural model having two kinds of chains through homoepitaxy at 550 degrees C Kim H, Li H, Seo JM
1516 - 1519	Selective growth of iron oxide thin films using the combined method of metal-organic chemical vapor deposition and microcontact printing Lee JY, Kang BC, Jung DY, Boo JH
1520 - 1523	Epitaxial Fe3O4 on SrTiO3 characterized by transmission electron microscopy Zheng JG, Sterbinsky GE, Cheng J, Wessels BW
1524 - 1528	Radiative and nonradiative lifetimes in nonpolar m-plane InxGa1-xN/GaN multiple quantum wells grown on GaN templates prepared by lateral epitaxial overgrowth Onuma T, Koyama T, Chakraborty A, McLaurin M, Haskell BA, Fini PT, Keller S, Denaars SP, Speck JS, Nakamura S, Mishra UK
1529 - 1532	Fabrication of GaN-based metal-oxide-semiconductor light-emitting diodes operating in ultraviolet spectral region Honda T, Kobayashi T, Komiyama S, Mashiyama Y
1533 - 1535	Interface and optical properties of InGaAsNSb/GaAs quantum wells on GaAs (411) substrates by molecular beam epitaxy Li W, Pei C, Torfi A, Moscicka D, Wang WI
1536 - 1541	Formation of (Zn,Co)O by annealing of Co overlayers on ZnO Dumont J, Mugumaoderha C, Seldrum T, Frising F, Moisson C, Turover D, Sporken R