Journal of Vacuum Science & Technology B

Journal of Vacuum Science & Technology B, Vol.27, No.4 Entire volume, number list

ISSN: 1071-1023 (Print)

In this Issue (55 articles)

L11 - L13	Characterization of 5 MeV proton-irradiated gallium nitride nanowires Kim HY, Ahn J, Mastro MA, Eddy CR, Han J, Yang T, Kim J
L14 - L17	Energetic deposition of B-10 on high aspect ratio trenches for neutron detectors Klepper CC, Monteiro OR, Carlson EP, Keitz MD
L18 - L20	Sub-10-nm nanolithography with a scanning helium beam Sidorkin V, van Veldhoven E, van der Drift E, Alkemade P, Salemink H, Maas D
1801 - 1804	Fabrication of high quality factor photonic crystal microcavities in InAsP/InP membranes combining reactive ion beam etching and reactive ion etching Martinez LJ, Prieto I, Alen B, Postigo PA
1805 - 1808	Nondestructive nanoscale profile measurement on two-dimensional photonic crystal structure using differential confocal microscopy Kuo WC, Juang FJ, Su HR, Hsieh ML
1809 - 1812	Dry etch selectivity of a-C:H hardmasks for sub-65 nm patterning applications Padhi D, Kim BH, Witty D
1813 - 1820	Fabrication of all-metal field emitter arrays with controlled apex sizes by molding Kirk E, Tsujino S, Vogel T, Jefimovs K, Gobrecht J, Wrulich A
1821 - 1824	Design and fabrication of surface acoustic wave delay line for surface acoustic wave chemical-agent sensors Zhao YG, Liu M, Li JJ, Niu JB, Li DM
1825 - 1828	Method for measuring solvent permeation through polymer film on porous dielectric films Geil RD, Senkevich JJ, Rogers BR
1829 - 1833	Well-aligned TiO2 nanofibers grown by near-field-electrospinning Rinaldi M, Ruggieri F, Lozzi L, Santucci S
1834 - 1837	X-ray photoelectron spectroscopy characterization of aminosilane anchored to ZnO nanorod arrays grown by an aqueous solution method with microwave-assisted heating Ogata K, Koike K, Sasa S, Inoue M, Yano M
1838 - 1843	Proximity effect in ion-beam-induced deposition of nanopillars Chen P, Salemink HWM, Alkemade PFA
1844 - 1850	Deconvolution analyses of secondary ion mass spectrometry shallow depth profiles with depth resolution functions from silicon substrate-based delta-doped samples Tomita M, Tanaka H, Koike M, Takeno S, Hori Y, Takahashi M
1851 - 1855	Investigation of etching two-dimensional microhole lattice array on lithium niobate with focused ion beam for fabricating photonic crystals Xu XF, Yan S, Xue JM, Wang YG, Wang KM, Wang XL
1856 - 1860	Fabrication of ZnO nanorods by pulsed Nd:YAG laser ablation deposition Shen YQ, Xu N, Lai JS, Sun J, Wu JD, Ying ZF, Okada T
1861 - 1864	Lift-off process using bilayer ultraviolet nanoimprint lithography and methacryloxypropyl-terminated-polydimethylsiloxane-based imprint resin Jung HY, Hwang SY, Bae BJ, Lee H
1865 - 1869	Ideal SiC Schottky barrier diodes fabricated using refractory metal borides Oder TN, Sutphin E, Kummari R
1870 - 1873	Electrical properties of nanoscale Au contacts on 4H-SiC Han SY, Lee JL, Pearton SJ
1874 - 1880	Scanning tunneling microscope-cathodoluminescence measurement of the GaAs/AlGaAs heterostructure Watanabe K, Nakamura Y, Ichikawa M, Kuboya S, Katayama R, Onabe K
1881 - 1885	Violet light-emitting diodes grown on crack-free AlGaN templates Wang TW, Chen NC, Lien WC, Wu MC, Shih CF
1886 - 1889	Fabrication of Si-based two-dimensional photonic quasicrystals by using multiple-exposure holographic lithography Yeo JB, Yun SD, Kim NH, Lee HY
1890 - 1896	Online detection system of microtarget assembly Qiu ZR, Wang T, Wang JJ, Li XH, Zhong Y
1897 - 1900	p-type behavior of nitrogen doped, lithium doped, and nitrogen-lithium codoped Zn0.11Mg0.89O thin films Qiu MX, Gu XQ, Ye ZZ, Lu JG, He HP, Zhang YZ, Zhao BH
1901 - 1903	Light enhancement of Al nanoclusters embedded in Al-doped ZnO films of GaN-based light-emitting diodes Lee CT, Chou YH, Yan JT, Lee HY
1904 - 1908	n-type, p-type and semi-insulating ZnO:N thin film growth by metal organic chemical vapor deposition with NH3 doping Zaidi T, Melton A, Fenwick WE, Ferguson I
1909 - 1914	Inductively coupled plasma etching of GaAs suspended photonic crystal cavities Braive R, Le Gratiet L, Guilet S, Patriarche G, Lemaitre A, Beveratos A, Robert-Philip I, Sagnes I
1915 - 1918	Enhanced resolution of poly(methyl methacrylate) electron resist by thermal processing Arjmandi N, Lagae L, Borghs G
1919 - 1925	Chemical effect of dry and wet cleaning of the Ru protective layer of the extreme ultraviolet lithography reflector Belau L, Park JY, Liang T, Seo H, Somorjai GA
1926 - 1932	Feature filling modeling for step and flash imprint lithography Chauhan S, Palmieri F, Bonnecaze RT, Willson CG
1933 - 1937	Dependence of local structural and electrical properties of nitride doped zinc oxide films on growth temperature Chen SH, Yu CF, Liu YJ, Lin TJ, Li YC
1938 - 1942	Evaluation of extreme-ultraviolet lithography mask absorber pattern on multilayer phase defect using extreme-ultraviolet microscope Hamamoto K, Sakaya N, Hosoya M, Kureishi M, Ohkubo R, Shoki T, Nagarekawa O, Kishimoto J, Watanabe T, Kinoshita H
1943 - 1948	Effects of nitrogen doping of ZnO during or after deposition Yen TF, DiNezza M, Haungs A, Kim SJ, Anderson WA, Cartwright AN
1949 - 1957	Patterning of alkanethiolate self-assembled monolayers by downstream microwave nitrogen plasma: Negative and positive resist behavior Weng CC, Liao JD, Wu YT, Tsai SC, Chen CH, Zharnikov M
1958 - 1962	Micropatterning of polymeric semiconductor by selective lift-off method using epoxy mold Wang Z, Yu XH, Xing RB, Han YC, Takahara A
1963 - 1968	Resistivity reduction by external oxidation of Cu-Mn alloy films for semiconductor interconnect application Iijima J, Fujii Y, Neishi K, Koike J
1969 - 1975	Accumulated sidewall damage in dry etched photonic crystals Berrier A, Shi Y, Siegert J, Marcinkevicius S, He S, Anand S
1976 - 1983	Analytical model for ArF photoresist shrinkage under scanning electron microscopy inspection Ayal G, Andelman D, Cohen Y
1984 - 1988	Synthesis of silicon-containing materials for UV-curable imprint etch barrier solutions Song SS, Kim SM, Choi BY, Jung GY, Lee H
1989 - 1992	The influence of external load and air pressure on air slide table performance of ultraprecision machines in nanomachining Vahdati M, Vahdati N
1995 - 1995	PAPERS FROM THE 36th ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES (PCSI) Preface Shanabrook B, Ludeke R
1996 - 2002	Loop formation in graphitic nanoribbon edges using furnace heating or Joule heating Jia XT, Campos-Delgado J, Gracia-Espino EE, Hofmann M, Muramatsu H, Kim YA, Hayashi T, Endo M, Kong J, Terrones M, Dresselhaus MS
2003 - 2007	Theory and measurements of room temperature transport in graphene using SiO2 backgate and electrochemical gate Shishir RS, Chen F, Xia J, Tao NJ, Ferry DK
2008 - 2011	Density functional theory calculations and the induced density of interface states model for noble metals/C-60 interfaces Abad E, Ortega J, Flores F
2012 - 2014	Surface, bulk, and interface electronic states of epitaxial BiFeO3 films Zhang J, Rutkowski M, Martin LW, Conry T, Ramesh R, Ihlefeld JF, Melville A, Schlom DG, Brillson LJ
2015 - 2019	Diffraction studies of submonolayer Sr structures on the Si (001) surface Reiner JW, Segal Y, Garrity KF, Hong H, Ismail-Beigi S, Ahn CH, Walker FJ
2020 - 2023	In-plane strain effects on dielectric properties of the HfO2 thin film Wakui S, Nakamura J, Natori A
2024 - 2027	In0.53Ga0.47As n-metal-oxide-semiconductor field effect transistors with atomic layer deposited Al2O3, HfO2, and LaAlO3 gate dielectrics Zhao H, Yum JH, Chen YT, Lee JC
2028 - 2035	Capacitance-voltage and photoluminescence study of high-k/GaAs interfaces controlled by Si interface control layer Akazawa M, Domanowska A, Adamowicz B, Hasegawa H
2036 - 2039	Ultralow resistance, nonalloyed Ohmic contacts to n-InGaAs Baraskar AK, Wistey MA, Jain V, Singisetti U, Burek G, Thibeault BJ, Lee YJ, Gossard AC, Rodwell MJW
2040 - 2043	Electrical transport in GaN nanowires grown by selective epitaxy Talin AA, Swartzentruber BS, Leonard F, Wang X, Hersee SD
2044 - 2047	Hot electron transport studies of the Cu/Si(001) interface using ballistic electron emission microscopy Garramone JJ, Abel JR, Sitnitsky IL, Moore RL, LaBella VP
2048 - 2054	Current collapse transient behavior and its mechanism in submicron-gate AlGaN/GaN heterostructure transistors Hasegawa H, Akazawa M
2055 - 2061	Plasmonic behavior of Ag/dielectric nanowires and the effect of geometry Prokes SM, Alexson D, Glembocki OJ, Park HD, Rendell RW
2062 - 2065	Anisotropic half-metallic ground state of Mn atomic wire on GaAs(110) Hirayama M, Natori A, Nakamura J
2066 - 2070	Molecular beam epitaxy of high mobility In0.75Ga0.25As for electron spin transport applications Simmonds PJ, Holmes SN, Beere HE, Farrer I, Sfigakis F, Ritchie DA, Pepper M