1 - 2 |
Proceedings of Symposium M on Optical and X-ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference, Strasbourg, France, June 10-13, 2003 Murtagh M, Ricote J, Chateigner D, Schreiber J |
3 - 13 |
Advances in the application of modulation spectroscopy to vertical cavity structures Hosea TJC |
14 - 22 |
Photomodulated reflectance and transmittance: optical characterisation of novel semiconductor materials and device structures Misiewicz J, Sek G, Kudrawiec R, Sitarek P |
23 - 28 |
Recent advances in characterization of ultra-thin films using specular X-ray reflectivity technique Banerjee S, Ferrari S, Chateigner D, Gibaud A |
29 - 33 |
Elastic-strain tensor and inhomogeneous strain in thin films by X-ray diffraction Balzar D, Popa NC |
34 - 41 |
Texture, residual stress and structural analysis of thin films using a combined X-ray analysis Lutterotti L, Chateigner D, Ferrari S, Ricote J |
42 - 50 |
Generalized ellipsometry for materials characterization Jellison GE |
51 - 59 |
Characterization of multilayered materials for optoelectronic components by high-resolution X-ray diffractometry and reflectometry: contribution of numerical treatments Durand O |
60 - 65 |
Application of photoreflectance spectroscopy to optoelectronic materials and devices Long L, Schreiber J |
66 - 70 |
Strain profiles in yttria stabilized zirconia epitaxial thin films determined by high-resolution X-ray diffraction Boulle A, Masson O, Guinebretiere R, Dauger A |
71 - 74 |
Three beam photoreflectance as a powerful method to investigate semiconductor heterostructures Kudrawiec R, Sek G, Sitarek P, Ryczko K, Misiewicz J, Wang T, Forchel A |
75 - 78 |
UV photoreflectance for wide band gap nitride characterization Bru-Chevallier C, Fanget S, Guillot G, Ruffenach S, Briot O |
79 - 83 |
The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy Montgomery PC, Montaner D, Manzardo O, Flury M, Herzig HP |
84 - 89 |
In-line monitoring of advanced microelectronic processes using combined X-ray techniques Wyon C, Delille D, Gonchond JP, Heider F, Kwakman L, Marthon S, Mazor I, Michallet A, Muyard D, Perino-Gallice L, Royer JC, Tokar A |
90 - 96 |
New developments in X-ray fluorescence metrology van der Haar LM, Sommer C, Stoop MGM |
97 - 100 |
Structural and optical properties of both pure poly (3-octylthiophene) (P3OT) and P3OT/fullerene films Erb T, Raleva S, Zhokhavets U, Gobsch G, Stuhn B, Spode M, Ambacher O |
101 - 104 |
Optical characterization of indium-tin-oxynitride fabricated by RF-sputtering Aperathitis E, Modreanu M, Bender M, Cimalla V, Ecke G, Androulidaki M, Pelekanos N |
105 - 110 |
Optical properties of silicon thin films related to LPCVD growth condition Modreanu M, Gartner M, Cobianu C, O'Looney B, Murphy F |
111 - 113 |
Kinetics of interfacial layer formation during deposition of HfO2 on silicon Essary C, Howard JM, Craciun V, Craciun D, Singh RK |
114 - 119 |
Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics Boher R, Evrard R, Condat O, Dos Reis C, Defranoux C, Bellandi E |
120 - 123 |
Metrology issues in thin ONO stacks measurements by spectroscopic ellipsometry and X-ray reflectivity Bellandi E, Elbaz A, Spadoni S, Piagge R, Coccorese C, Pavia G, Ferrari S, Banerjee S, Alessandri M |
124 - 127 |
X-Ray reflectivity and spectroscopic ellipsometry as metrology tools for the characterization of interfacial layers in high-kappa materials Ferrari S, Modreanu M, Scarel G, Fanciulli M |
128 - 133 |
Application of the X-ray combined analysis to the study of lead titanate based ferroelectric thin films Ricote J, Chateigner D, Morales M, Calzada ML, Wiemer C |
134 - 137 |
Combining grazing incidence X-ray diffraction and X-ray reflectivity for the evaluation of the structural evolution of HfO2 thin films with annealing Wiemer C, Ferrari S, Fanciulli M, Pavia G, Lutterotti L |
138 - 142 |
Application of X-ray scattering methods to the analysis of Si-based heterostructures Woitok JF |
143 - 147 |
Residual stress analysis of thin films and coatings through XRD2 experiments Gelfi M, Bontempi E, Roberti R, Armelao L, Depero LE |
148 - 150 |
Photoreflectance spectroscopy study of vertical cavity surface emitting laser structures Murtagh ME, Guenebaut V, Ward S, Nee D, Kelly PV, O'Looney B, Murphy F, Modreanu M, Westwater S, Blunt R, Bland SW |
151 - 154 |
Photoreflectance spectroscopy for the study of GaAsSb/InP heterojunction bipolar transistors Bru-Chevallier C, Chouaib H, Arcamone J, Benyattou T, Lahreche H, Bove P |
155 - 158 |
Photoreflectance studies of (A1)Ga- and N-face AlGaN/GaN heterostructures Buchheim C, Winzer AT, Goldhahn R, Gobsch G, Ambacher O, Link A, Eickhoff M, Stutzmann M |
159 - 162 |
Characterization of InP and GaAs films by contactless transient photoconductivity measurements Kunst M, Neitzert HC, Sanders A |
163 - 166 |
Temperature-dependent electric fields in GaN Schottky diodes studied by electroreflectance Shokhovets S, Fuhrmann D, Goldhahn R, Gobsch G, Ambacher O, Hermann M, Eickhoff M |
167 - 172 |
Theoretical concept of strain effect on reflectance anisotropy and photoreflectance spectra of semiconductor multilayer system Long L, Schreiber J |
173 - 177 |
Infrared spectroscopic ellipsometry applied to the characterization of nano-structures of silicon IC manufacturing Boher P, Bucchia M, Guillotin C, Defranoux C |
178 - 182 |
Controllable Fabry-Perot interferometer based on dynamic volume holograms Petrov VM, Lichtenberg S, Chamrai AV, Petter J, Tschudi T |
183 - 186 |
A XRD study of Co/Au multilayers using a laboratory microdiffractometer Bontempi E, Depero LE |
187 - 190 |
Buried interface characterization by interference microscopy Benatmane A, Montgomery PC |
191 - 194 |
Advanced cure monitoring by optoelectronic multifunction sensing system Giordano M, Laudati A, Russo M, Nasser J, Persiano GV, Cusano A |
195 - 198 |
Giant LO oscillation in the Zn1-xBex(Se,Te) multi-phonons percolative alloys Tite T, Pages O, Ajjoun M, Laurenti JP, Gorochov O, Tournie E, Maksimov O, Tamargo MC |
199 - 202 |
The dielectric function of a GaAs/AlGaAs single quantum well: calculation and comparison with experiment Herasimovich A, Shokhovets S, Goldhahn R, Gobsch G |
203 - 206 |
Photoelectrical measurements of the local value of the contact potential difference in the metal-insulator semiconductor (MIS) structures Kudla A, Przewlocki HM, Borowicz L, Brzezinska D, Rzodkiewicz W |
207 - 210 |
A methodology to reduce error sources in the determination of thin film chemical composition by EDAX Ares JR, Pascual A, Ferrer IJ, Sanchez C |
211 - 215 |
X-ray characterisation of chemical solution deposited PbTiO3 films with high Ca doping Calzada ML, Bretos I, Jimenez R, Ricote J, Mendiola J |
216 - 221 |
Anisotropic crystallite size analysis of textured nanocrystalline silicon thin films probed by X-ray diffraction Morales M, Leconte Y, Rizk R, Chateigner D |
222 - 225 |
Application of modulation spectroscopy for determination of recombination center parameters Makhniy VP, Slyotov MM, Stets E, Tkachenko IV, Gorley VV, Horley PP |