The deposition of plasma polymers on poly(acrylonitrile) (PAN) fibers has been investigated by X-ray photoelectron spectroscopy and dynamic contact angle measurements. Four polymerizable monomers were examined: tetrafluoromethane (TFM), perfluoropropene (PFP), tetramethyl-disiloxane (TMS), and hexamethyldisiloxane (HMS). The deposition rate of TFM was undetectable and the treated fibers exhibited some fluorination and an increase of hydrophilicity, due to posttreatment oxidation after exposure to air. The deposition rate of PFP was quite slow and the formation of an incomplete fluorinated layer was observed, with a remarkable increase of the water advancing contact angles. TMS and more so HMS quickly formed continuous and reproducible polysiloxane layers having pronounced hydrophobic properties. The influence of the position of the fibers in the plasma reactor chamber was also investigated. A good uniformity of deposition was found when the fibers were placed at different points between the electrodes.