This review reports the successful synthesis of novel oligomeric silanes having end-capped fluoroalkyl groups. Glass surface was effectively modified by these oligomeric silanes. In particular, oligomeric silanes were more reactive and effective in the surface fluoroalkylation than monomeric silanes. From contact angle measurements, surface free energies were reduced to 15 - 20 and 1 - 3 mJ/m(2) for the dispersive and the polar components, respectively, and the surfaces were shown to be both highly water- and oil-repellent. Modified glass surface was analyzed using XPS. A linear correlation was observed between the dispersive component of surface free energy gamma(S)(d) and the area ratio of the F1s peak to the Si2p peak. The structure of the siloxane layer on the modified glass surface is discussed in terms of a network interphase model.